"A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic ..."

Yonggang Yin et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325272

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-15

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Yonggang Yin, Danyang Ren, Yuqi Wang, Da Gao, Junhui Shi:
A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic Spectroscopy. SENSORS 2023: 1-4

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