"Micro Coriolis Mass Flow Sensor with Large Channel Diameter by Wet Etching ..."

Qihui Yu et al. (2022)

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DOI: 10.1109/SENSORS52175.2022.9967152

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type: Conference or Workshop Paper

metadata version: 2024-10-06

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Qihui Yu, Mahdieh Yariesbouei, Remco J. Wiegerink, Joost C. Lötters:
Micro Coriolis Mass Flow Sensor with Large Channel Diameter by Wet Etching of Silicon. IEEE SENSORS 2022: 1-4

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