"A Two-Axis MEMS Piezoresistive In-Plane Accelerometer with Pure Axially ..."

Mingzhi Yu et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589746

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Mingzhi Yu, Libo Zhao, Weile Jiang, Chen Jia, Zhikang Li, Yulong Zhao, Zhuangde Jiang:
A Two-Axis MEMS Piezoresistive In-Plane Accelerometer with Pure Axially Deformed Microbeams. IEEE SENSORS 2018: 1-4

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