"Thermal radiation sensing using high mechanical Q-factor silicon nitride ..."

Chang Zhang et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956551

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-16

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Chang Zhang, Mathieu Giroux, Théa Abdul Nour, Raphael St-Gelais:
Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes. IEEE SENSORS 2019: 1-4

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