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"High-Density Integration of Multiple Independent Temperature-Controlled ..."

Zheng Zhang et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325133

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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  dblp key:
  - conf/ieeesensors/ZhangLLZXD23
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  - https://dblp.org/rec/conf/ieeesensors/ZhangLLZXD23
Zheng Zhang, Liyang Luo, Yuanyuan Luo, Zhaohua Zhang, Chaoyang Xing, Guotao Duan:
High-Density Integration of Multiple Independent Temperature-Controlled Micro Hotplates for MEMS Gas Sensors. SENSORS 2023: 1-4

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