"Design and Test of Mems Resonant Pressure Sensor with A Novel Membrane ..."

Zichao Zhang et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784876

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-01

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Zichao Zhang, Cun Li, Hong Xue, Le Hao, Kai Bu, Jiabin Ai, Yulong Zhao:
Design and Test of Mems Resonant Pressure Sensor with A Novel Membrane Structure. IEEE SENSORS 2024: 1-4

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