"Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer."

Hongcai Zhang, Xueyong Wei, Zhuangde Jiang (2018)

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DOI: 10.1109/ICSENS.2018.8589648

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Hongcai Zhang, Xueyong Wei, Zhuangde Jiang:
Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer. IEEE SENSORS 2018: 1-4

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