"High Performance Bidirectional Thermal Gas Flow Sensor of (100) Silicon ..."

Yan Zhang et al. (2023)

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DOI: 10.1109/SENSORS56945.2023.10325274

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Yan Zhang, Dongcheng Xie, Yujie Yang, Ruichen Liu, Chong Xing, Feng Xue, Dongliang Chen, Lei Xu:
High Performance Bidirectional Thermal Gas Flow Sensor of (100) Silicon Single-Sided Fabrication by 45°-Tilted Dicing. SENSORS 2023: 1-4

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