"Terahertz Quasi-MIM Absorber for Integrating with Thin-film MEMS Bolometers."

Zihao Zhao et al. (2024)

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DOI: 10.1109/SENSORS60989.2024.10784743

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-04

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Zihao Zhao, Kazuho Harada, Chao Li, Isao Morohashi, Ya Zhang:
Terahertz Quasi-MIM Absorber for Integrating with Thin-film MEMS Bolometers. IEEE SENSORS 2024: 1-4

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