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"A Methodology for Evaluating the Technological Maturity of Micro and Nano ..."

Emmanuel Brousseau et al. (2010)

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DOI: 10.1007/978-3-642-11598-1_38

access: open

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Emmanuel Brousseau, Richard Barton, Stefan S. Dimov, Samuel Bigot:
A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes. IPAS 2010: 329-336

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