"Influence of Interfacial Oxide Layers in Hf0.5Zr0.5O2 based ferroelectric ..."

Ruben Alcala et al. (2022)

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DOI: 10.1109/IMW52921.2022.9779287

access: closed

type: Conference or Workshop Paper

metadata version: 2025-09-06

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Ruben Alcala, Furqan Mehmood, Pramoda Vishnumurthy, Terence Mittmann, Thomas Mikolajick, Uwe Schroeder:
Influence of Interfacial Oxide Layers in Hf0.5Zr0.5O2 based ferroelectric capacitors on reliability performance. IMW 2022: 1-4

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