"An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer ..."

Weishen Chu et al. (2022)

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DOI: 10.1109/IMW52921.2022.9779248

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-16

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Weishen Chu, Seyyed Ehsan Esfahani Rashidi, Yanli Zhang, Johann Alsmeier, Toshiyuki Sega:
An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer Warpage Prediction. IMW 2022: 1-4

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