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"Detection of Defects on SiC Substrate by SEM and Classification Using Deep ..."
Shota Monno et al. (2018)
- Shota Monno, Yoshifumi Kamada, Hiroyoshi Miwa, Koji Ashida, Tadaaki Kaneko:
Detection of Defects on SiC Substrate by SEM and Classification Using Deep Learning. INCoS 2018: 47-58
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