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"Motion Control of Piezo-Driven Stage via a Chattering-Free Sliding Mode ..."

Yunfeng Fan et al. (2018)

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DOI: 10.1109/IROS.2018.8593442

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-25

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Yunfeng Fan, Yichang He, Dingguo Zhang, U-Xuan Tan:
Motion Control of Piezo-Driven Stage via a Chattering-Free Sliding Mode Controller with Hysteresis Compensation. IROS 2018: 6424-6430

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