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"Servo Controller For Electrostatic Micro-actuators."

Hideki Hashimoto et al. (1988)

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DOI: 10.1109/IROS.1988.592394

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-07

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Hideki Hashimoto, Kwee-Bo Sim, Hiroyuki Fujita, Fumio Harashima:
Servo Controller For Electrostatic Micro-actuators. IROS 1988: 21-26

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