"Optimal design, modeling and analysis of a 2-DOF nanopositioning stage ..."

Hui Tang, Yangmin Li (2012)

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DOI: 10.1109/IROS.2012.6385839

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-10

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Hui Tang, Yangmin Li:
Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning. IROS 2012: 658-663

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