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"An investigation of capacitance aging model for extreme low-k and high-k ..."
M. N. Chang et al. (2015)
- M. N. Chang, Y.-H. Lee, S. Y. Lee, C. C. Chiu, D. Maji, K. Wu:
An investigation of capacitance aging model for extreme low-k and high-k dielectrics. IRPS 2015: 3
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