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"New Access to Soft Breakdown Parameters of Low-k Dielectrics Through ..."

Norbert Herfurth et al. (2019)

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DOI: 10.1109/IRPS.2019.8720458

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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  - conf/irps/HerfurthBABSHAH19
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  - https://dblp.org/rec/conf/irps/HerfurthBABSHAH19
Norbert Herfurth, Anne Beyreuther, Elham Amini, Christian Boit, Michél Simon-Najasek, Susanne Hübner, Frank Altmann, R. Herfurth, Chen Wu, Ingrid De Wolf, Kris Croes:
New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis. IRPS 2019: 1-9

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