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"Thickness dependence on electrical and reliability properties for dense ..."

Kai-Chieh Kao et al. (2015)

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DOI: 10.1109/IRPS.2015.7112778

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Kai-Chieh Kao, Chi-Jia Huang, Chang-Sian Wu, Yi-Lung Cheng:
Thickness dependence on electrical and reliability properties for dense and porous low dielectric constant materials. IRPS 2015: 6

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