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"Method to assess the impact of LER and spacing variation on BEOL ..."
Deniz Kocaay et al. (2018)
- Deniz Kocaay, Philippe Roussel, Kristof Croes, Ivan Ciofi, Alicja Lesniewska, Ingrid De Wolf:
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing. IRPS 2018: 10-1
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