"Metal reliability mechanisms in Ruthenium interconnects."

Olalla Varela Pedreira et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9129087

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Olalla Varela Pedreira, Michele Stucchi, Anshul Gupta, Victor Vega-Gonzalez, Marleen van der Veen, Stephane Lariviere, Christopher J. Wilson, Zsolt Tökei, Kristof Croes:
Metal reliability mechanisms in Ruthenium interconnects. IRPS 2020: 1-7

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