"Blocking Oxide Material Engineering to Improve Retention Loss in 3D NAND: ..."

Tommaso Rollo et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529303

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Tommaso Rollo, Hansel Lo, Luca Larcher, Christopher Olsen, Milan Pesic:
Blocking Oxide Material Engineering to Improve Retention Loss in 3D NAND: a Modeling Process Optimization Study. IRPS 2024: 1-5

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