"Investigation of monolayer MX2 as sub-nanometer copper diffusion barriers."

Kirby K. H. Smithe et al. (2018)

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DOI: 10.1109/IRPS.2018.8353681

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Kirby K. H. Smithe, Zhongwei Zhu, Connor S. Bailey, Eric Pop, Alex Yoon:
Investigation of monolayer MX2 as sub-nanometer copper diffusion barriers. IRPS 2018: 1

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