"An investigation of process dependence of porous IMD TDDB."

Wenyi Zhang et al. (2015)

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DOI: 10.1109/IRPS.2015.7112819

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-21

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Wenyi Zhang, M. C. Silvestre, A. Selvam, E. Ramanathan, C. Ordonio, J. Schaller, Tian Shen, Kong Boon Yeap, C. Capasso, Patrick Justison, J. H. Lee:
An investigation of process dependence of porous IMD TDDB. IRPS 2015: 1

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