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"A MEMS-based temperature-compensated vacuum sensor for low-power ..."

Mohammad Ali Taghvaei et al. (2010)

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DOI: 10.1109/ISCAS.2010.5537914

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-04

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  - conf/iscas/TaghvaeiCANE10
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Mohammad Ali Taghvaei, Paul-Vahe Cicek, Karim Allidina, Frederic Nabki, Mourad N. El-Gamal:
A MEMS-based temperature-compensated vacuum sensor for low-power monolithic integration. ISCAS 2010: 3276-3279

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