"Prediction of Radio Frequency Impedance Matching in Plasma Equipment Using ..."

Byungwhan Kim, Donghwan Kim, Seung Soo Han (2006)

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DOI: 10.1007/11760191_150

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Byungwhan Kim, Donghwan Kim, Seung Soo Han:
Prediction of Radio Frequency Impedance Matching in Plasma Equipment Using Neural Network. ISNN (2) 2006: 1028-1035

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