"An automatic optical-simulation-based lithography hotspot fix flow for ..."

Yang-Shan Tong, Chia-Wei Lin, Sao-Jie Chen (2009)

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DOI: 10.1145/1514932.1514959

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yang-Shan Tong, Chia-Wei Lin, Sao-Jie Chen:
An automatic optical-simulation-based lithography hotspot fix flow for post-route optimization. ISPD 2009: 115-122

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