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"A matching based decomposer for double patterning lithography."

Yue Xu, Chris Chu (2010)

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DOI: 10.1145/1735023.1735054

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yue Xu, Chris Chu:
A matching based decomposer for double patterning lithography. ISPD 2010: 121-126

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