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"Die/wafer stacking with reciprocal design symmetry (RDS) for mask reuse in ..."
Syed M. Alam et al. (2009)
- Syed M. Alam, Robert E. Jones, Scott Pozder, Ankur Jain:
Die/wafer stacking with reciprocal design symmetry (RDS) for mask reuse in three-dimensional (3D) integration technology. ISQED 2009: 569-575
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