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"Understanding, modeling, and detecting pooling hotspots in copper CMP."

Aaron Gower-Hall et al. (2012)

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DOI: 10.1109/ISQED.2012.6187496

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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  dblp key:
  - conf/isqed/Gower-HallGWTEYBG12
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  persistent URL:
  - https://dblp.org/rec/conf/isqed/Gower-HallGWTEYBG12
Aaron Gower-Hall, Tamba Gbondo-Tugbawa, JenPin Weng, Wei-tsu Tseng, Laertis Economikos, Toshiaki Yanagisawa, Pavan Bashaboina, Stephen Greco:
Understanding, modeling, and detecting pooling hotspots in copper CMP. ISQED 2012: 208-215

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