"Simulation and design of AIN piezoelectric resonator for infrared sensing ..."

Wan Chia Ang et al. (2014)

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DOI: 10.1109/ISSNIP.2014.6827633

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Wan Chia Ang, Piotr Kropelmcki, Andrew Benson Randies, Alex Yuandong Gu, Kam Chew Leong, Chuan Seng Tan:
Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode. ISSNIP 2014: 1-6

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