"Silicon Nanowires embedded pressure sensor with annularly grooved ..."

Songsong Zhang et al. (2014)

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DOI: 10.1109/ISSNIP.2014.6827620

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-04

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Songsong Zhang, Tao Wang, Chengkuo Lee, Liang Lou, Wei Mong Tsang, Dim-Lee Kwong:
Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement. ISSNIP 2014: 1-6

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