"Pattern Similarity Metrics for Layout Pattern Classification and Their ..."

Atsushi Takahashi et al. (2018)

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DOI: 10.1109/ISVLSI.2018.00095

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-01

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Atsushi Takahashi, Shimpei Sato, Hiroki Ogura, Yu-Min Sung, Ting-Chi Wang:
Pattern Similarity Metrics for Layout Pattern Classification and Their Validity Analysis by Lithographic Responses. ISVLSI 2018: 494-497

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