"Design of ring type trench PZT for tube type micropump by using FEM analysis."

Eiichi Aizawa, Kazuyoshi Tsuchiya, Yasutomo Uetsuji (2012)

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DOI: 10.1109/MHS.2012.6492403

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Eiichi Aizawa, Kazuyoshi Tsuchiya, Yasutomo Uetsuji:
Design of ring type trench PZT for tube type micropump by using FEM analysis. MHS 2012: 197-200

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