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"Low pull-in voltage electrostatic MEMS switch using liquid dielectric."

Mohammed Affan Zidan, Jürgen Kosel, Khaled N. Salama (2014)

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DOI: 10.1109/MWSCAS.2014.6908379

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Mohammed Affan Zidan, Jürgen Kosel, Khaled N. Salama:
Low pull-in voltage electrostatic MEMS switch using liquid dielectric. MWSCAS 2014: 169-172

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