"Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer ..."

M. Aarts, Jia Wei, Pasqualina M. Sarro (2012)

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DOI: 10.1109/NEMS.2012.6196768

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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M. Aarts, Jia Wei, Pasqualina M. Sarro:
Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer for large out-of-plane motion and improved power efficiency. NEMS 2012: 253-256

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