"Systematic error analysis and modeling of MEMS close-loop capacitive ..."

Gang Dai et al. (2010)

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DOI: 10.1109/NEMS.2010.5592157

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Gang Dai, Hongming Yu, Wei Su, Beibei Shao, Mei Li:
Systematic error analysis and modeling of MEMS close-loop capacitive accelerometer. NEMS 2010: 88-92

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