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"Through Glass Vias by Wet-etching Process in 49% HF Solution Using an ..."
Guang-Hui Ding et al. (2021)
- Guang-Hui Ding, Binghe Ma, Yu-Chao Yan, Weizheng Yuan, Jinjun Deng, Jian Luo:
Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr/Au Mask. NEMS 2021: 872-875
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