"Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator ..."

Hanyong Dong et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451317

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-25

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Hanyong Dong, Jintao Pang, Dongsheng Li, Qian Zhang, Jin Xie:
Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator and MoS2 for Multifunctional Applications. NEMS 2021: 463-466

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