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"An electrostatic vertical comb-drive micromirror with self-aligned assembly."

Yanjun Fan et al. (2017)

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DOI: 10.1109/NEMS.2017.8017022

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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  dblp key:
  - conf/nems/FanCYSWL17
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  - https://dblp.org/rec/conf/nems/FanCYSWL17
Yanjun Fan, Can Cui, Huijun Yu, Wenjiang Shen, Zhi Wang, Jun Li:
An electrostatic vertical comb-drive micromirror with self-aligned assembly. NEMS 2017: 268-272

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