BibTeX record conf/nems/GuiZLHG16

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@inproceedings{DBLP:conf/nems/GuiZLHG16,
  author    = {Yiming Gui and
               Yangxi Zhang and
               Guandong Liu and
               Yilong Hao and
               Chengchen Gao},
  title     = {Design and simulation of corrugated diaphragm applied to the {MEMS}
               fiber optic pressure sensor},
  booktitle = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
               and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages     = {152--155},
  publisher = {{IEEE}},
  year      = {2016},
  url       = {https://doi.org/10.1109/NEMS.2016.7758220},
  doi       = {10.1109/NEMS.2016.7758220},
  timestamp = {Mon, 09 Aug 2021 14:54:01 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuiZLHG16.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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