BibTeX record conf/nems/GuoDWQKY13

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@inproceedings{DBLP:conf/nems/GuoDWQKY13,
  author    = {X. B. Guo and
               Jian{-}Ning Ding and
               S. Y. Wang and
               J. H. Qiu and
               Bao Kan and
               Ning{-}Yi Yuan},
  title     = {Mechanical durability of micro-nano structures surface of black silicon
               produced by femtosecond laser},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1218--1221},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559938},
  doi       = {10.1109/NEMS.2013.6559938},
  timestamp = {Fri, 06 Mar 2020 09:49:19 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GuoDWQKY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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