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"A lamination micromixier using silicon DRIE technology."

Kazuki Ishikawa et al. (2011)

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DOI: 10.1109/NEMS.2011.6017439

access: closed

type: Conference or Workshop Paper

metadata version: 2018-02-23

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Kazuki Ishikawa, Takeshi Saito, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada:
A lamination micromixier using silicon DRIE technology. NEMS 2011: 650-653

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