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"In situ heating to improve adhesion for parylene-on-parylene deposition."

Dongyang Kang et al. (2012)

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DOI: 10.1109/NEMS.2012.6196762

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  dblp key:
  - conf/nems/KangCKT12
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  - https://dblp.org/rec/conf/nems/KangCKT12
Dongyang Kang, Jay Han-Chieh Chang, Justin Young-Hyun Kim, Yu-Chong Tai:
In situ heating to improve adhesion for parylene-on-parylene deposition. NEMS 2012: 226-229

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