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"Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI ..."

Zhihao Li, Yunping Niu, Hao Ren (2022)

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DOI: 10.1109/NEMS54180.2022.9791180

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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  dblp key:
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Zhihao Li, Yunping Niu, Hao Ren:
Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI substrate. NEMS 2022: 330-333

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