"A two-dimensional silicon-on-glass actuator with dispensed polymer microlens."

Pei Li, Long-Fa Pan, Hans Zappe (2013)

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DOI: 10.1109/NEMS.2013.6559714

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Pei Li, Long-Fa Pan, Hans Zappe:
A two-dimensional silicon-on-glass actuator with dispensed polymer microlens. NEMS 2013: 199-202

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