"Investigation of the Reliability of the Interconnection between Metal ..."

Mengxia Liu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451359

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type: Conference or Workshop Paper

metadata version: 2021-06-28

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Mengxia Liu, Xianshan Dong, Jian Cui, Qiancheng Zhao:
Investigation of the Reliability of the Interconnection between Metal Electrode and Silicon Anchor in Silicon-on-Glass Process. NEMS 2021: 1102-1105

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