"A compact force sensor with low temperature drift design using a standard ..."

Benxian Peng et al. (2010)

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DOI: 10.1109/NEMS.2010.5592278

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-12

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Benxian Peng, Ting Yu, Fengqi Yu, Yuchun Feng:
A compact force sensor with low temperature drift design using a standard CMOS process. NEMS 2010: 806-809

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