"Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel ..."

Nan Wang et al. (2012)

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DOI: 10.1109/NEMS.2012.6196767

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/WangYKKE12
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  - https://dblp.org/rec/conf/nems/WangYKKE12
Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi:
Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch. NEMS 2012: 247-252

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