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"Fabrication and thermal stability characterization of Ru electrode used ..."

Hongze Zhang, Zhihong Li (2013)

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DOI: 10.1109/NEMS.2013.6559746

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Hongze Zhang, Zhihong Li:
Fabrication and thermal stability characterization of Ru electrode used for high power contact RF MEMS switch. NEMS 2013: 340-343

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